Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Microelectromechanical systems (MEMS): fabrication, design and applications

Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and systems on the scale of micrometers. Initially micromachining techniques were borrowed directly from the integrated circuit (IC) industry, but now many unique MEMS-specific micromachining processes are being developed. In MEMS, a wide variety of transduction mechanisms ca...

Reliability of Microelectromechanical Systems (MEMS)

Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues. This “evolutionary” partitioning of microsystems has led to long incubation t...

Microelectromechanical Systems ( MEMS ) Technology Integration Into Microspacecraft

The need to significantly reduce the mass, power, and volume of future scientific spacecraft has resulted in an incrcascd interest on the part of NASA in the relatively new technology of rnicroelectrornechanical systems (IW31S). In addition to being light, compact and low-power-consuming, MEMS technology offers other advantages to space applications. Chief among these are robust performance wit...

MicroElectroMechanical Systems : MEMS Technology Overview and Limitations

Fabrication and Characterization of Glassy Carbon MEMS

This paper describes the fabrication of free-standing high-carbon microstructures by softlithographic techniques; these structures ranged in complexity from simple beams to complex, suspended deflectors. Microstructures of polymeric precursors (copolymers of furfuryl alcohol-phenol) to high-carbon solids were fabricated using poly(dimethylsiloxane) (PDMS) molds. Carbonization of these microstru...